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Sensing properties of ZnO Nanostructured Layers

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	Guia i Martín, Lluís Manel; Rodríguez-Cantó, Pedro J.; Muñoz Sanjosé, Vicente; Arana, Sergio; Reig Escrivà, Càndid
	This document is a artículoDate2017
	Nanostructured ZnO layers have been deposited onto SiO2/Si substrates by spray pyrolysis, with previously patterned interdigitated gold electrodes. We have then measured the capacitive and resistive response against ambient parameters such as relative humidity and illumination.
	Guia i Martín, Lluís Manel Rodríguez-Cantó, Pedro J. Muñoz Sanjosé, Vicente Arana, Sergio Reig Escrivà, Càndid 2017 Sensing properties of ZnO Nanostructured Layers Spanish Conference on Electron Devices 2017 36 39
	https://doi.org/10.1109/CDE.2017.7905211